The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2015

Filed:

Jun. 14, 2011
Applicants:

Won-kyu Lee, Yongin, KR;

Jae-beom Choi, Yongin, KR;

Jae-hwan OH, Yongin, KR;

Young-jin Chang, Yongin, JP;

Seong-hyun Jin, Yongin, KR;

Inventors:

Won-Kyu Lee, Yongin, KR;

Jae-Beom Choi, Yongin, KR;

Jae-Hwan Oh, Yongin, KR;

Young-Jin Chang, Yongin, JP;

Seong-Hyun Jin, Yongin, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); H01L 21/268 (2006.01); B23K 26/06 (2014.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/06 (2013.01);
Abstract

A laser irradiation apparatus for irradiating a laser beam to a semiconductor layer including a plurality of pixel areas, the apparatus includes a laser generator generating the laser beam, and an optical switching unit time-dividing the laser beam generated from the laser generator and transmitting a plurality of time-divided laser beams to a plurality of optical systems. The apparatus includes a first optical system of the plurality of optical systems that receives a first time-divided laser beam and irradiates a first laser slit beam along a first irradiation direction, and a second optical system of the plurality of optical systems that receives a second time-divided laser beam and irradiates a second laser slit beam along a second irradiation direction that is parallel with the first irradiation direction. The first laser slit beam and the second laser slit beam crystallize partial areas at a same location in the respective pixel areas.


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