The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Feb. 12, 2014
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Abstract
According to one embodiment, a pattern formation method includes: forming a first guide layer having of first openings exposing a surface of an underlayer, and the first openings being arranged in a first direction; forming a second guide layer on the underlayer and on the first guide layer, the second guide layer extending in the first direction, the second guide layer dividing each of the first openings into the first opening portion and the second opening portion, and the second guide layer being sandwiched by a first opening portion and a second opening portion; forming a block copolymer layer in each of the first opening portion and the second opening portion; forming a first layer and a second layer surrounded by the first layer in each of the first opening portion and the second opening portion by phase-separating the block copolymer layer; and removing the second layer.