The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Jan. 27, 2014
Applicant:
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Inventors:
Shintaro Sato, Atsugi, JP;
Taisuke Iwai, Sagamihara, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 29/16 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); C01B 31/04 (2006.01); H01L 29/778 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02664 (2013.01); C01B 2204/06 (2013.01); H01L 29/1606 (2013.01); H01L 29/66742 (2013.01); H01L 29/78684 (2013.01); H01L 21/02378 (2013.01); H01L 21/02527 (2013.01); H01L 21/0259 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 31/0484 (2013.01); H01L 29/66439 (2013.01); H01L 29/78696 (2013.01); H01L 29/778 (2013.01);
Abstract
Particles having a property of absorbing carbon at a particular temperature or higher are deposited on a graphene. The particles are heated to a temperature equal to the particular temperature or higher to make the particles absorb carbon from portions of the graphene under the particles. The particles are removed. Consequently, a graphene nanomesh is obtained.