The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Nov. 30, 2010
Applicants:
Joerg Ortner, Drobollach, AT;
Michael Sorger, Villach, AT;
Inventors:
Joerg Ortner, Drobollach, AT;
Michael Sorger, Villach, AT;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B28B 7/22 (2006.01); B28B 11/08 (2006.01); B22D 19/00 (2006.01); H01L 21/02 (2006.01); H05K 1/02 (2006.01); H01L 21/768 (2006.01); H01L 21/311 (2006.01); H01L 21/48 (2006.01); H01L 23/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B22D 19/0072 (2013.01); H01L 21/02 (2013.01); H05K 1/02 (2013.01); H01L 21/76898 (2013.01); H01L 21/311 (2013.01); H01L 21/486 (2013.01); H01L 24/05 (2013.01); G03F 7/0002 (2013.01); H05K 2201/09036 (2013.01); H05K 2203/0108 (2013.01); H05K 2203/308 (2013.01); Y10S 977/887 (2013.01);
Abstract
In a method of processing a substrate in accordance with an embodiment, a trench may be formed in the substrate, imprint material may be deposited at least into the trench, the imprint material in the trench may be embossed using a stamp device, and the stamp device may be removed from the trench.