The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
May. 04, 2011
Geunbae Lim, Gyeongsangbuk-Do, KR;
Taechang an, Gyeongsangbuk-Do, KR;
Jinyoung Kim, Gyeongsangbuk-Do, KR;
Jungwoo Sung, Gyeongsangbuk-Do, KR;
Sangwoo Lee, Daejeon, KR;
Geunbae Lim, Gyeongsangbuk-Do, KR;
Taechang An, Gyeongsangbuk-Do, KR;
Jinyoung Kim, Gyeongsangbuk-Do, KR;
Jungwoo Sung, Gyeongsangbuk-Do, KR;
Sangwoo Lee, Daejeon, KR;
AGENCY FOR DEFENSE DEVELOPMENT, Daejeon, KR;
Abstract
A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof, an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated using an empty space of the recess portion, and a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator. Accordingly, the natural frequency of the resonator can be easily controlled.