The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
Feb. 28, 2011
Applicants:
Mikael Wahlsten, Stockholm, SE;
Per-erik Gustafsson, Solna, SE;
Inventors:
Mikael Wahlsten, Stockholm, SE;
Per-Erik Gustafsson, Solna, SE;
Assignee:
Mycronic AB, Taby, SE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G03F 9/00 (2006.01); G03F 7/20 (2006.01); H05K 3/46 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7003 (2013.01); G03F 7/70383 (2013.01); H05K 3/4679 (2013.01);
Abstract
A method of patterning a plurality of layers of a work piece in a series of writing cycles in one or a plurality of write machines, the workpiece being deviced to have a number of N layers and layers of the workpiece having one or a plurality of boundary condition(s) for pattern position, the method comprising the steps of: determining the boundary conditions of layers 1 to N, calculating deviations due to the boundary conditions and calculating a compensation for the deviation of the first transformation added with the assigned part of the deviation due to the boundary conditions.