The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
May. 07, 2013
Multi-resolution optical probing system having reliable temperature control and mechanical isolation
Applicant:
Checkpoint Technologies, Llc., San Jose, CA (US);
Inventors:
David J Morgan, Boulder Creek, CA (US);
Thomas E Clawges, Pleasanton, CA (US);
Horst E Groneberg, Pleasanton, CA (US);
Guoqing Xiao, Saratoga, CA (US);
Assignee:
CheckPoint Technologies, LLC, San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/95 (2006.01); G01N 21/88 (2006.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G02B 21/0016 (2013.01); G01N 21/8806 (2013.01);
Abstract
An optical probe system for probing an electronic device includes a sample plate that can hold a target device comprising an integrated circuit, an optical objective system that can collect reflected or emitted light from the integrated circuit in the target device, and a temperature control chamber that can hold a fluid to control the temperature of the target device.