The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
Nov. 20, 2012
David M. Chen, Brookline, MA (US);
Jan H. Kuypers, Cambridge, MA (US);
Pritiraj Mohanty, Los Angeles, CA (US);
Klaus Juergen Schoepf, Chandler, AZ (US);
Guiti Zolfagharkhani, Brighton, MA (US);
Jason Goodelle, Boston, MA (US);
Reimund Rebel, Maricopa, AZ (US);
David M. Chen, Brookline, MA (US);
Jan H. Kuypers, Cambridge, MA (US);
Pritiraj Mohanty, Los Angeles, CA (US);
Klaus Juergen Schoepf, Chandler, AZ (US);
Guiti Zolfagharkhani, Brighton, MA (US);
Jason Goodelle, Boston, MA (US);
Reimund Rebel, Maricopa, AZ (US);
Sand 9, Inc., Cambridge, MA (US);
Abstract
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.