The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2015

Filed:

Jun. 10, 2011
Applicants:

Robert F. Cannata, Santa Barbara, CA (US);

Yaroslava Petraitis, Ventura, CA (US);

Patrick Franklin, Santa Barbara, CA (US);

Robert Simes, Santa Barbara, CA (US);

Richard E. Bornfreund, Santa Barbara, CA (US);

Inventors:

Robert F. Cannata, Santa Barbara, CA (US);

Yaroslava Petraitis, Ventura, CA (US);

Patrick Franklin, Santa Barbara, CA (US);

Robert Simes, Santa Barbara, CA (US);

Richard E. Bornfreund, Santa Barbara, CA (US);

Assignee:

FLIR Systems, Inc., Wilsonville, OR (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01J 5/20 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
G01J 5/20 (2013.01); H01L 27/14634 (2013.01); H01L 27/14669 (2013.01);
Abstract

A microbolometer is disclosed, including a bottom multilayered dielectric, having a first silicon oxynitride layer and a second silicon oxynitride layer disposed above the first silicon oxynitride layer, the first and second silicon oxynitride layers having different refractive indices. The microbolometer further includes a detector layer disposed above the bottom multilayered dielectric, the detector layer comprised of a temperature sensitive resistive material, and a top dielectric disposed above the detector layer.


Find Patent Forward Citations

Loading…