The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2015

Filed:

Jul. 29, 2010
Applicants:

Tokuyuki Nakayama, Ichikawa, JP;

Yoshiyuki Abe, Ichikawa, JP;

Inventors:

Tokuyuki Nakayama, Ichikawa, JP;

Yoshiyuki Abe, Ichikawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/08 (2006.01); C23C 14/34 (2006.01); C04B 35/01 (2006.01); C04B 35/645 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
H01B 1/08 (2013.01); C04B 35/01 (2013.01); C04B 35/645 (2013.01); C04B 2235/3229 (2013.01); C04B 2235/3232 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3256 (2013.01); C04B 2235/3258 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/3293 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/5472 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/6565 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/6581 (2013.01); C04B 2235/6585 (2013.01); C04B 2235/6586 (2013.01); C04B 2235/668 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2235/95 (2013.01); C04B 2235/963 (2013.01); C23C 14/08 (2013.01); C23C 14/3414 (2013.01);
Abstract

A target for sputtering which enables to attain high rate film-formation of a transparent conductive film suitable for a blue LED or a solar cell. A oxide sintered body includes an indium oxide and a cerium oxide, and one or more oxide of titanium, zirconium, hafnium, molybdenum and tungsten. The cerium content is 0.3 to 9% by atom, as an atomicity ratio of Ce/(In+Ce+M), the M element content is equal to or lower than 1% by atom, as an atomicity ratio of M/(In+Ce+M), and the total content of cerium and the M element is equal to or lower than 9% by atom, as an atomicity ratio of (Ce+M)/(In+Ce+M). The oxide sintered body has an InOphase of a bixbyite structure has a CeOphase of a fluorite-type structure finely dispersed as crystal grains having an average particle diameter of equal to or smaller than 3 μm.


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