The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
Apr. 24, 2012
Applicants:
Mari Kusunoki, Mie, JP;
Takuo Ohashi, Mie, JP;
Shinji Miyazaki, Mie, JP;
Norihiko Kamiura, Mie, JP;
Inventors:
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D 16/20 (2006.01); F16K 31/10 (2006.01); F16K 31/04 (2006.01); F16K 31/44 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05D 16/2013 (2013.01); F16K 31/10 (2013.01); F16K 31/04 (2013.01); F16K 31/445 (2013.01); H01L 21/67253 (2013.01);
Abstract
A pressure control device according to an embodiment includes a solenoid portion for regulating a gate opening of a valve through a first shaft portion connected to the valve, a micrometer for regulating the gate opening through the first shaft portion and a second shaft portion having an axial direction which is parallel with that of the first shaft portion when the second shaft portion is connected to the first shaft portion, and a switching portion. The switching portion switches to cause the solenoid portion to regulate the gate opening or to cause the micrometer to regulate the gate opening.