The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
Sep. 14, 2012
Erik Hop, Apeldoorn, NL;
Gerard Klaasse, Apeldoorn, NL;
Rob Slakhorst, Almelo, NL;
Wico Hopman, Enschede, NL;
Arnout Van Den Bos, Deurningen, NL;
Erik Hop, Apeldoorn, NL;
Gerard Klaasse, Apeldoorn, NL;
Rob Slakhorst, Almelo, NL;
Wico Hopman, Enschede, NL;
Arnout van den Bos, Deurningen, NL;
Sensata Technologies, Inc., Attleboro, MA (US);
Abstract
Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor for pressure measurement. The MEMS sensor is attached to a glass tube which is compressively sealed to a mounting frame that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube and the mounting frame and a rigid seal between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor.