The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2015

Filed:

Jun. 26, 2012
Applicants:

Masashi Shimura, Suwa, JP;

Takayuki Kikuchi, Okaya, JP;

Inventors:

Masashi Shimura, Suwa, JP;

Takayuki Kikuchi, Okaya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/21 (2006.01); H01L 41/09 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 3/02 (2013.01); H03H 9/21 (2013.01); H03H 2003/026 (2013.01);
Abstract

A double-side tuning fork-type bending vibration piece having a basal part, a pair of drive vibration arms, a pair of detection vibration arms, drive electrodes and detection electrodes includes adjustment films of a metallic material or the like formed in connecting areas between the vibration arms and the basal part. The adjustment films are formed in such a way as to cover an area of tapered portions formed in connecting parts between the drive vibration arms and the basal part, an area of the basal part near the tapered portions and an area of the drive vibration arms. While monitoring a detection current outputted from the detection electrodes when the drive vibration arms are excited in driving mode, the adjustment films are partly deleted by laser irradiation so that the detection current becomes 0.


Find Patent Forward Citations

Loading…