The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2015

Filed:

Sep. 06, 2013
Applicant:

Georgia Tech Research Corporation, Atlanta, GA (US);

Inventors:

Zhong Lin Wang, Atlanta, GA (US);

Wenzhuo Wu, Atlanta, GA (US);

Xiaonan Wen, Atlanta, GA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 41/113 (2006.01); G06F 3/041 (2006.01); H01L 27/20 (2006.01); H01L 41/22 (2013.01);
U.S. Cl.
CPC ...
H01L 29/84 (2013.01); H01L 41/1132 (2013.01); G06F 3/0414 (2013.01); G06F 2203/04103 (2013.01); H01L 27/20 (2013.01); H01L 41/22 (2013.01);
Abstract

A tactile sensing matrix includes a substrate, a first plurality of elongated electrode structures, a plurality of vertically aligned piezoelectric members, an insulating layer infused into the piezoelectric members and a second plurality of elongated electrode structures. The first plurality of elongated electrode structures is disposed on the substrate along a first orientation. The vertically aligned piezoelectric members is disposed on the first plurality of elongated electrode structures and form a matrix having columns of piezoelectric members disposed along the first orientation and rows of piezoelectric members disposed along a second orientation that is transverse to the first orientation. The second plurality of elongated electrode structures is disposed on the insulating layer along the second orientation. The elongated electrode structures form a Schottky contact with the piezoelectric members. When pressure is applied to the piezoelectric members, current flow therethrough is modulated.


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