The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2015

Filed:

Apr. 07, 2011
Applicants:

Ryo Akiike, Ayase, JP;

Hideto Kuramochi, Ayase, JP;

Hitoshi Iigusa, Ayase, JP;

Inventors:

Ryo Akiike, Ayase, JP;

Hideto Kuramochi, Ayase, JP;

Hitoshi Iigusa, Ayase, JP;

Assignee:

Tosoh Corporation, Yamaguchi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/00 (2006.01); C23C 14/00 (2006.01); C23C 14/32 (2006.01); D06N 7/04 (2006.01); G11B 5/64 (2006.01); C23C 14/58 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/5873 (2013.01); Y10T 428/24355 (2015.01); C23C 14/08 (2013.01); C23C 14/086 (2013.01); C23C 14/34 (2013.01);
Abstract

A transparent conductive zinc oxide based film according to the present invention contains Ti, Al and Zn in such a proportion that satisfies the following formulae (1), (2) and (3) in terms of atomic ratio, and has a plurality of surface textures different in size on a surface, wherein a center-line average surface roughness Ra of the surface of the transparent conductive film is 30 nm to 200 nm, and an average value of widths of the surface textures is 100 nm to 10 μm.0.001≦Ti/(Zn+Al+Ti)≦0.079.  (1)0.001≦Al/(Zn+Al+Ti)≦0.079  (2)0.010≦(Ti+Al)/(Zn+Al+Ti)≦0.080  (3)


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