The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Dec. 27, 2012
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;
Inventors:
Bong-Kyun Kim, Hwaseong-si, KR;
Hong Sick Park, Suwon-si, KR;
Wang Woo Lee, Suwon-si, KR;
Young Min Moon, Seongnam-si, KR;
Seung Ho Yoon, Hwaseong-si, KR;
Young Joo Choi, Anyang-si, KR;
Sang-Woo Kim, Seongnam-si, KR;
Ki-Beom Lee, Seoul, KR;
Dae-Woo Lee, Seoul, KR;
Sam-Young Cho, Anyang-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/461 (2006.01); H01L 21/465 (2006.01); H01L 29/66 (2006.01); H01L 21/3213 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 21/465 (2013.01); H01L 29/66969 (2013.01); H01L 21/32134 (2013.01); H01L 29/7869 (2013.01);
Abstract
An etchant composition includes ammonium persulfate (((NH))SO), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, a nitrate-containing compound, a phosphate-containing compound, a chloride-containing compound, and residual water.