The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Feb. 23, 2011
Applicant:
Heinz Kraus, Zeilarn, DE;
Inventor:
Heinz Kraus, Zeilarn, DE;
Assignee:
Wacker Chemie AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/24 (2006.01); H01L 21/20 (2006.01); C23C 16/44 (2006.01); C01B 33/035 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4418 (2013.01); Y10T 428/2933 (2015.01); C01B 33/035 (2013.01); C23C 16/24 (2013.01);
Abstract
A method for producing polycrystalline silicon rods by deposition from the gas phase on a thin rod, wherein one or a plurality of disks consisting of a material having a lower electrical resistivity than the polycrystalline silicon under deposition conditions are introduced above the electrodes and/or below the bridge of the rod pair.