The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2015

Filed:

Oct. 21, 2013
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Yasuhiro Aida, Tokyo, JP;

Ryu Ohta, Tokyo, JP;

Yoshitomo Tanaka, Tokyo, JP;

Hiroshi Chihara, Tokyo, JP;

Hitoshi Sakuma, Tokyo, JP;

Kazuhiko Maejima, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); H01L 41/08 (2006.01); H01L 41/187 (2006.01); G01L 1/16 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0805 (2013.01); H01L 41/1873 (2013.01); G01L 1/16 (2013.01); B41J 2/045 (2013.01);
Abstract

The displacement as an actuator or the sensitivity as a sensor of a piezoelectric element can be increased and, in addition, the electric power consumption can be reduced by providing a thin film of potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO, as a piezoelectric layer, wherein a crystal orientation of a crystal structure of potassium-sodium niobate has in-plane fourfold symmetry as a whole piezoelectric layer, where a first axis of rotational symmetry is a thickness direction of the piezoelectric layer.


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