The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Feb. 19, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
Tokyo Institute of Technology, Tokyo, JP;
Sophia School Corporation, Tokyo, JP;
Makoto Kubota, Yokohama, JP;
Kaoru Miura, Matsudo, JP;
Hisato Yabuta, Machida, JP;
Takayuki Watanabe, Yokohama, JP;
Jumpei Hayashi, Chofu, JP;
Hiroshi Funakubo, Yokohama, JP;
Shintaro Yasui, Yokohama, JP;
Takahiro Oikawa, Yokohama, JP;
Jun-ichi Nagata, Yokohama, JP;
Hiroshi Uchida, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Tokyo Institute of Technology, Tokyo, JP;
Sophia School Corporation, Tokyo, JP;
Abstract
The piezoelectric element includes, on a substrate: a piezoelectric film; and a pair of electrodes provided in contact with the piezoelectric film; in which the piezoelectric film contains a perovskite-type metal oxide represented by the general formula (1) as a main component:A(ZnTi)(MgTi)MO  General Formula (1)wherein the perovskite-type metal oxide is uniaxially (111)-oriented in pseudo-cubic notation in a thickness direction, of the pair of electrodes, a lower electrode provided on the substrate side is a multilayer electrode including at least a first electrode layer in contact with the substrate and a second electrode layer in contact with the piezoelectric film, and the second electrode layer is a perovskite-type metal oxide electrode which is uniaxially (111)-oriented in pseudo-cubic notation in a thickness direction.