The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Mar. 13, 2013
Applicant:
Azbil Corporation, Tokyo, JP;
Inventors:
Yuuki Seto, Tokyo, JP;
Tomohisa Tokuda, Tokyo, JP;
Assignee:
Azbil Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01); G01L 9/06 (2006.01); G01L 13/06 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 13/025 (2013.01); G01L 13/06 (2013.01); G01L 9/0092 (2013.01); G01L 9/0083 (2013.01);
Abstract
A pressure sensor chip includes a sensor diaphragm that outputs a signal in accordance with a pressure differential, and first and second holding members that face, on peripheral edge portions thereof, one face and another face of a sensor diaphragm, and are in contact therewith. In the peripheral edge portion of the first holding member, in a region that faces the one face of the sensor diaphragm, a region on an outer peripheral side is a region that is bonded to the one face of the sensor diaphragm, and a region on an inner peripheral side is a region that is not bonded to the one face of the sensor diaphragm.