The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2015

Filed:

Dec. 30, 2010
Applicants:

Philip Jason Stephanou, San Jose, CA (US);

Cenk Acar, Irvine, CA (US);

Ravindra Vaman Shenoy, San Jose, CA (US);

David William Burns, San Jose, CA (US);

Justin Phelps Black, San Jose, CA (US);

Kurt Edward Petersen, Milpitas, CA (US);

Srinivasan Kodaganallur Ganapathi, San Jose, CA (US);

Inventors:

Philip Jason Stephanou, San Jose, CA (US);

Cenk Acar, Irvine, CA (US);

Ravindra Vaman Shenoy, San Jose, CA (US);

David William Burns, San Jose, CA (US);

Justin Phelps Black, San Jose, CA (US);

Kurt Edward Petersen, Milpitas, CA (US);

Srinivasan Kodaganallur Ganapathi, San Jose, CA (US);

Assignee:

QUALCOMM MEMS Technologies, Inc., San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 15/18 (2013.01); G01C 25/00 (2006.01); G01C 19/5712 (2012.01); G01C 19/5747 (2012.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01C 25/00 (2013.01); Y10T 29/49155 (2015.01); Y10T 29/42 (2015.01); Y10T 29/49002 (2015.01); G01C 19/5712 (2013.01); G01C 19/5747 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); G01P 15/18 (2013.01);
Abstract

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, two-axis accelerometers and three-axis accelerometers. Combining fabrication processes for such devices can enable the monolithic integration of six inertial sensing axes on a single substrate, such as a single glass substrate. Such devices may be included in a mobile device, such as a mobile display device.


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