The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2015

Filed:

Jan. 17, 2012
Applicant:

Paul M. Werking, Rockford, MN (US);

Inventor:

Paul M. Werking, Rockford, MN (US);

Assignee:

Honeywell International Inc., Morristown, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 17/02 (2006.01); G01R 5/00 (2006.01); G01R 19/02 (2006.01);
U.S. Cl.
CPC ...
G01R 5/00 (2013.01); G01R 19/02 (2013.01);
Abstract

An electromechanical system (MEMS) voltmeter. An exemplary MEMS voltmeter includes a proof mass mounted to a substrate in a teeter-totter manner. The MEMS voltmeter also includes an input voltage plate located on the substrate under a first end of the proof mass. The first input voltage plate receives a voltage from a device under test. A drive voltage plate is located on the substrate under a second end of the proof mass. A first sense input voltage plate is located on the substrate under the first end of the proof mass. A second sense voltage plate is located on the substrate under the second end of the proof mass. A rebalancing circuit receives signals from the proof mass and the first and second sense voltage plates and generates a voltage value that is equal to the root mean square (RMS) voltage of the device under test.


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