The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Feb. 24, 2009
Applicants:
Hsin Hui Hsu, HsinChu, TW;
Sheng Ta Lee, HsinChu, TW;
Chuan Wei Wang, HsinChu, TW;
Inventors:
Assignee:
Pixart Imaging Incorporation, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); H01L 23/58 (2006.01); B81C 1/00 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
H01L 23/585 (2013.01); H01L 41/1132 (2013.01); B81C 1/00571 (2013.01); B81C 2201/014 (2013.01); B81C 2203/0109 (2013.01); H01L 2924/3025 (2013.01); H01L 2924/0002 (2013.01);
Abstract
The present invention discloses a MEMS device with guard ring, and a method for making the MEMS device. The MEMS device comprises a bond pad and a sidewall surrounding and connecting with the bond pad, characterized in that the sidewall forms a guard ring by an etch-resistive material.