The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2015

Filed:

Aug. 26, 2011
Applicants:

Un-cheol Sung, Yongin, KR;

Beom Rak Choi, Yongin, KR;

Inventors:

Un-Cheol Sung, Yongin, KR;

Beom Rak Choi, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 33/08 (2010.01); B02C 13/00 (2006.01); B05C 11/00 (2006.01); H01L 21/677 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6776 (2013.01); C23C 14/042 (2013.01); C23C 14/243 (2013.01); C23C 14/568 (2013.01); H01L 21/67173 (2013.01);
Abstract

A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. A thin film deposition apparatus for forming a thin film on a substrate includes a first chamber in a vacuum state; first and second stages arranged in parallel in the first chamber wherein the substrate is fixable to at least one of the first and second stages; a mask contactable with the substrate; and a first deposition source and a second deposition source that are movable relative to the first and second stages and are configured to discharge a deposition material onto the substrate.


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