The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2015

Filed:

Feb. 26, 2013
Applicant:

Quantumscape Corporation, San Jose, CA (US);

Inventor:

Isaiah O. Oladeji, Gotha, FL (US);

Assignee:

QuantumScape Corporation, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/20 (2006.01); C23C 18/12 (2006.01); H01M 4/04 (2006.01); H01M 4/139 (2010.01); H01M 10/052 (2010.01); H01M 10/0562 (2010.01);
U.S. Cl.
CPC ...
C23C 18/125 (2013.01); C23C 18/1258 (2013.01); C23C 18/1295 (2013.01); H01M 4/0428 (2013.01); H01M 4/139 (2013.01); H01M 10/052 (2013.01); H01M 10/0562 (2013.01);
Abstract

A method for manufacturing thin films for a battery device. The method includes vaporizing a precursor material from a liquid source to form droplets ranging from, for example, about 10 microns to about 20 microns. Thereafter, the method includes subjecting the droplets from about 10 to about 20 microns to a megasonic energy source to cause formation of a plurality of smaller droplets ranging from, for example, about 0.25 micron to about 5 microns which are then directed to a heated substrate, where through a heterogeneous reaction a film of material overlying the surface region is formed. The method includes irradiating (e.g., ultra-violet, infra-red, or plasma) the film of material using electromagnetic radiation to process the film to cause a recrystallization of the film to form larger sized crystalline materials. Optionally, the method includes sequentially performing the vaporizing, reacting/releasing, and irradiating to build up a thickness of the film of material.


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