The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Dec. 05, 2012
Applicant:
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Inventors:
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); B82Y 40/00 (2011.01); B82Y 10/00 (2011.01); B82Y 30/00 (2011.01); C01B 31/02 (2006.01); C23C 14/22 (2006.01); C23C 16/04 (2006.01); C23C 16/26 (2006.01); H01L 23/532 (2006.01); H01L 29/06 (2006.01); H01L 51/00 (2006.01); H01L 51/05 (2006.01); H01L 29/775 (2006.01);
U.S. Cl.
CPC ...
H01L 21/768 (2013.01); B82Y 10/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 31/0233 (2013.01); C01B 2202/36 (2013.01); C23C 14/221 (2013.01); C23C 14/228 (2013.01); C23C 16/04 (2013.01); C23C 16/26 (2013.01); H01L 21/76867 (2013.01); H01L 21/76876 (2013.01); H01L 21/76879 (2013.01); H01L 23/53276 (2013.01); H01L 29/0673 (2013.01); H01L 29/0676 (2013.01); H01L 29/775 (2013.01); H01L 51/0048 (2013.01); H01L 51/0558 (2013.01); H01L 2221/1094 (2013.01); H01L 2924/0002 (2013.01); Y10S 977/843 (2013.01);
Abstract
A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject.