The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Sep. 13, 2011
Applicant:
Yoshiaki Tomari, Kanagawa, JP;
Inventor:
Yoshiaki Tomari, Kanagawa, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/67 (2006.01); C25D 5/08 (2006.01); C25D 21/10 (2006.01); H01L 21/288 (2006.01); H01L 21/306 (2006.01); C25D 7/12 (2006.01); C25D 17/00 (2006.01); C25D 17/02 (2006.01); C25D 17/08 (2006.01); C25D 21/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67086 (2013.01); C25D 5/08 (2013.01); C25D 21/10 (2013.01); H01L 21/2885 (2013.01); H01L 21/30608 (2013.01); H01L 21/6708 (2013.01); C25D 7/123 (2013.01); C25D 17/001 (2013.01); C25D 17/02 (2013.01); C25D 17/08 (2013.01); C25D 21/12 (2013.01);
Abstract
A chemical treatment apparatus and a method for performing a chemical treatment of a wafer, etc., by supplying a chemical via a cell. The apparatus includes a cylindrical inner cell and a cylindrical outer cell with open ends disposed at an outer circumference of the inner cell. The outer cell is axially movable to vary the width of a slit formed between a bottom end of the outer cell and a top surface of the substrate-holding means by the axial movement, thereby adjusting the discharge rate of the chemical and varying the pressure of the chemical.