The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Aug. 28, 2013
Applicant:
Nxp B. V., Eindhoven, NL;
Inventors:
Gerhard Koops, Aalst, BE;
Jozef Thomas Martinus van Beek, Rosmalen, NL;
Assignee:
NXP, B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/302 (2006.01); H01L 41/332 (2013.01); H03H 3/007 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/332 (2013.01); H03H 3/0072 (2013.01); H03H 9/02259 (2013.01); Y10S 977/762 (2013.01);
Abstract
A piezo-resistive MEMS resonator comprising an anchor, a resonator mounted on the anchor, an actuator mounted to apply an electrostatic force on the resonator and a piezo-resistive read-out means comprising a nanowire coupled to the resonator.