The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Apr. 12, 2012
Demetrius Papapanayiotou, Westford, MA (US);
Arthur Keigler, Wellesley, MA (US);
David Guarnaccia, Carlisle, MA (US);
Jonathan Hander, Westford, MA (US);
Johannes Chiu, Bedford, MA (US);
Demetrius Papapanayiotou, Westford, MA (US);
Arthur Keigler, Wellesley, MA (US);
David Guarnaccia, Carlisle, MA (US);
Jonathan Hander, Westford, MA (US);
Johannes Chiu, Bedford, MA (US);
Tel Nexx, Inc., Billerica, MA (US);
Abstract
A process electrolyte replenishment module adapted to replenish ions in a process electrolyte in a substrate electrochemical deposition apparatus having a first anode and a first cathode, the replenishment module having a second anode. A process electrolyte recirculation compartment is disposed in the frame configured so that the process electrolyte is recirculating between the replenishment module and the deposition apparatus. An anode compartment is coupled to the process electrolyte recirculation compartment having the second anode, that is a soluble anode, for immersion in a secondary anolyte, and having a first ion exchange membrane being a cationic member separating the secondary anolyte from the process electrolyte. A cathode compartment is provided in the frame coupled to the process electrolyte recirculation compartment having a second cathode for immersion in a secondary catholyte, and having a second ion exchange membrane being a monovalent selective membrane separating the secondary catholyte from the process electrolyte.