The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Jun. 28, 2011
Applicants:
Daiyu Okafuji, Joetsu, JP;
Masaki Takeuchi, Joetsu, JP;
Hiroyuki Yamazaki, Joetsu, JP;
Inventors:
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 7/24 (2006.01); C03C 15/02 (2006.01); B24B 19/03 (2006.01); B24B 7/22 (2006.01);
U.S. Cl.
CPC ...
B24B 7/241 (2013.01); C03C 15/02 (2013.01); B24B 19/03 (2013.01); B24B 7/228 (2013.01);
Abstract
An electronic grade synthetic quartz glass substrate having a recess, channel or step is manufactured by machining at least one surface of a synthetic quartz glass substrate having a maximum birefringence of up to 3 nm/cm in its entirety to form a recess, channel or step, and removing the residual stress due to machining.
Okafuji, Daiyu. (2015). Method for manufacturing electronic grade synthetic quartz glass substrate (U.S. Patent No. 9017144). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9017144
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile