The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Jun. 28, 2011
Applicants:
Daiyu Okafuji, Joetsu, JP;
Masaki Takeuchi, Joetsu, JP;
Hiroyuki Yamazaki, Joetsu, JP;
Inventors:
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 7/24 (2006.01); C03C 15/02 (2006.01); B24B 19/03 (2006.01); B24B 7/22 (2006.01);
U.S. Cl.
CPC ...
B24B 7/241 (2013.01); C03C 15/02 (2013.01); B24B 19/03 (2013.01); B24B 7/228 (2013.01);
Abstract
An electronic grade synthetic quartz glass substrate is manufactured by machining a synthetic quartz glass substrate to form a recess, channel or step and polishing the bottom and side surfaces of the recess, channel or step to mirror finish by a working portion of a rotary polishing tool while keeping the working portion in contact with the bottom and side surfaces under independent constant pressures.