The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
May. 30, 2011
Applicants:
Shiro Hara, Tsukuba, JP;
Hitoshi Maekawa, Tsukuba, JP;
Inventors:
Shiro Hara, Tsukuba, JP;
Hitoshi Maekawa, Tsukuba, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65D 51/28 (2006.01); B65D 85/86 (2006.01); B65D 51/18 (2006.01); H01L 21/677 (2006.01); A47B 47/00 (2006.01); A47B 81/00 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67772 (2013.01); A47B 47/0091 (2013.01); A47B 81/00 (2013.01); B65D 51/28 (2013.01); B65D 2313/04 (2013.01); H01L 21/6773 (2013.01); H01L 21/67379 (2013.01); H01L 21/67775 (2013.01);
Abstract
In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred together with the coupling chamber into the apparatus by means of magnetic attraction forces exerted between the transfer box, transfer box door and apparatus door, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail.