The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Jul. 13, 2010
Philippe Andreucci, Moirans, FR;
Laurent Duraffourg, Voiron, FR;
Carine Marcoux, Voiron, FR;
Pierre Brianceau, Biviers, FR;
Sebastien Hentz, Varces, FR;
Stephane Minoret, Grenoble, FR;
Edward Myers, Sherman Oaks, CA (US);
Michael Roukes, Pasadena, CA (US);
Philippe Andreucci, Moirans, FR;
Laurent Duraffourg, Voiron, FR;
Carine Marcoux, Voiron, FR;
Pierre Brianceau, Biviers, FR;
Sebastien Hentz, Varces, FR;
Stephane Minoret, Grenoble, FR;
Edward Myers, Sherman Oaks, CA (US);
Michael Roukes, Pasadena, CA (US);
Commissariat à l'énergie et aux énergies alternatives, Paris, FR;
California Institute of Technology, Pasadena, CA (US);
Abstract
A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system.