The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Nov. 09, 2011
Applicant:
Akinori Miyata, Utsunomiya, JP;
Inventor:
Akinori Miyata, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 21/04 (2006.01); G01B 21/02 (2006.01); G01B 5/008 (2006.01);
U.S. Cl.
CPC ...
G01B 5/008 (2013.01); G01B 21/045 (2013.01);
Abstract
An acting force is applied to a probe on the basis of a target speed serving as a probe speed in a stable copy scanning state of a target surface to be measured and a probe speed error serving as a difference between the target speed and a probe speed.