The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Oct. 01, 2013
Applicant:
Allegro Microsystems, Llc, Worcester, MA (US);
Inventors:
David G. Erie, Cottage Grove, MN (US);
Joseph Burkhardt, Minneapolis, MN (US);
Steven Kosier, Lakeville, MN (US);
Assignee:
Allegro Microsystems, LLC, Worcester, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B 5/33 (2006.01); G01R 33/00 (2006.01); G01R 33/09 (2006.01); C23F 1/12 (2006.01); C23F 1/14 (2006.01);
U.S. Cl.
CPC ...
G01R 33/0052 (2013.01); G01R 33/096 (2013.01); C23F 1/12 (2013.01); C23F 1/14 (2013.01); G11B 5/33 (2013.01);
Abstract
Novel anisotropic magneto-resistive (AMR) sensor architectures and techniques for fabricating same are described. In at least one embodiment, an AMR sensor is provided that includes barber pole structures having upper and low metal layers that are formed of different materials. The metal material closer to the AMR element is formed of a material that can be etched using an etching process that does not attack the AMR material. In some other embodiments, AMR sensors having segmented AMR sensing elements are described.