The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Sep. 26, 2007
Kazuhiro Atsumi, Hamamatsu, JP;
Koji Kuno, Hamamatsu, JP;
Tatsuya Suzuki, Hamamatsu, JP;
Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
A converging point of processing laser light is made to accurately follow a laser light irradiation surface of an object to be processed. An object to be processedis irradiated with measuring laser light along a line to cut, astigmatism is added to a reflected light component of the measuring laser light reflected by a front faceof the objectirradiated with the measuring laser light, a displacement sensor signal corresponding to a converged light image of the reflected light component having the astigmatism added thereto is detected, and the displacement sensor signal is made to become a feedback reference value corresponding to the quantity of the reflected light component, so as to locate the converging point of the processing laser light at a predetermined position with respect to the front face. This allows tire converging point of the processing laser light to follow the front faceof the objectreliably and accurately even when an area exhibiting an extremely low reflectance to the measuring laser light exists in a part of the front faceand lowers the quantity of the reflected light component of the measuring laser light.