The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Jan. 23, 2012
Sang-joon Seo, Yongin, KR;
Seung-hun Kim, Yongin, KR;
Jin-kwang Kim, Yongin, KR;
Seung-yong Song, Yongin, KR;
Sang-Joon Seo, Yongin, KR;
Seung-Hun Kim, Yongin, KR;
Jin-Kwang Kim, Yongin, KR;
Seung-Yong Song, Yongin, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A vapor deposition apparatus, which is capable of performing a thin film deposition process and improving characteristics of a formed thin film, includes a chamber having an exhaust opening; a stage located in the chamber, and including a plurality of mounting surfaces on which the plurality of substrates may be mounted; and an injection unit having at least one injection opening for injecting a gas into the chamber in a direction parallel with surfaces of the plurality of substrates.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile