The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Oct. 26, 2010
Applicants:
Akira Hasegawa, Tsukuba, JP;
Toshiya Kuroda, Tsukuba, JP;
Takashi Sanada, Ichihara, JP;
Inventors:
Assignee:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2006.01); C23C 16/50 (2006.01); C23C 14/08 (2006.01); C23C 14/56 (2006.01); H01L 51/00 (2006.01); H01L 51/52 (2006.01); C23C 16/40 (2006.01); C23C 16/503 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/086 (2013.01); C23C 14/562 (2013.01); H01L 51/0097 (2013.01); H01L 51/5253 (2013.01); C23C 16/401 (2013.01); C23C 16/503 (2013.01); C23C 16/545 (2013.01); Y02E 10/549 (2013.01); B32B 2307/202 (2013.01); B32B 2307/412 (2013.01); B32B 2307/724 (2013.01); B32B 2307/726 (2013.01); B32B 2457/00 (2013.01);
Abstract
A process for producing a multilayer film which, even when bent, is less apt to decrease in barrier property or electrical conductivity. The process comprises forming a barrier film and a transparent conductive film on a resin film to produce a multilayer film. The barrier film is formed by a plasma enhanced CVD method which uses electric discharge between rolls. The transparent conductive film is preferably formed by physical vapor deposition. The resin film preferably is a polyester resin film or a polyolefin resin film.