The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Feb. 02, 2012
Applicants:
Takehiko Yoshimura, Tokyo, JP;
Tatsuhiko Nagata, Tokyo, JP;
Masaru Seki, Tokyo, JP;
Yoshinori Cho, Saitama, JP;
Inventors:
Takehiko Yoshimura, Tokyo, JP;
Tatsuhiko Nagata, Tokyo, JP;
Masaru Seki, Tokyo, JP;
Yoshinori Cho, Saitama, JP;
Assignee:
Right Mfg. Co. Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65B 31/04 (2006.01); H01L 21/54 (2006.01); B01L 1/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67772 (2013.01); Y10S 414/135 (2013.01);
Abstract
A load part has a nozzle unit having outlets for generating outflow and/or inflow of gas used for replacing the atmosphere of a wafer storage container, in a direction approximately parallel to spaces between adjacent wafers being stored, are a driving unit for extending the nozzle unit to a door opening portion.