The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Apr. 20, 2012
David P. Potasek, Minneapolis, MN (US);
John C. Christenson, Prior Lake, MN (US);
Bruce H. Satterlund, Eagan, MN (US);
Randy Phillips, Farmington, MN (US);
Dave Holmquist, Apple Valley, MN (US);
David P. Potasek, Minneapolis, MN (US);
John C. Christenson, Prior Lake, MN (US);
Bruce H. Satterlund, Eagan, MN (US);
Randy Phillips, Farmington, MN (US);
Dave Holmquist, Apple Valley, MN (US);
Rosemount Aerospace Inc., Burnsville, MN (US);
Abstract
A MEMS pressure sensor may be manufactured to include a backing substrate having a diaphragm backing portion and a pedestal portion. A diaphragm substrate may be manufactured to include a pedestal portion and a diaphragm that is mounted to the diaphragm backing portion of the backing substrate to form a stress isolated MEMS die. The pedestal portions of the backing and diaphragm substrates form a pedestal of the stress isolated MEMS die. The pedestal is configured for isolating the diaphragm from stresses including packaging and mounting stress imparted on the stress isolated MEMS die.