The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
May. 23, 2011
Applicants:
BO Zou, San Jose, CA (US);
Hao Luo, Milpitas, CA (US);
Assignee:
Senodia Technologies (Shanghai) Co., Ltd., Shanghai, CN;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/00 (2013.01); G01P 15/125 (2006.01); G01P 15/18 (2013.01); G01P 15/14 (2013.01); G01C 19/5762 (2012.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01P 15/18 (2013.01); G01P 15/14 (2013.01); G01C 19/5762 (2013.01);
Abstract
A MEMS device comprises a proof mass suspended above a substrate, one or more driving combs, and one or more sensing combs. During operation, a DC actuating potential in series with an AC modulation potential is applied to the proof mass, and an AC actuating potential is applied to the one or more driving combs such that the proof mass moves in an oscillatory manner. An inertial sensing system further comprises a sensing element configured to detect a rotation information coupled with an AC signal and an acceleration information coupled with a DC signal.