The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Feb. 02, 2012
Applicants:

Chun Christine Dong, Macungie, PA (US);

Russell A. Siminski, Zionsville, PA (US);

Inventors:

Chun Christine Dong, Macungie, PA (US);

Russell A. Siminski, Zionsville, PA (US);

Assignee:

Air Products and Chemicals, Inc., Allentown, PA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 7/24 (2006.01); B23K 1/20 (2006.01); B01J 19/08 (2006.01); B23K 35/38 (2006.01); C23G 5/024 (2006.01);
U.S. Cl.
CPC ...
B23K 1/203 (2013.01); B01J 19/088 (2013.01); B23K 35/38 (2013.01); C23G 5/024 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Described herein is a method and apparatus for removing metal oxides on a surface of a component via electron attachment. In one embodiment, there is provided a field emission apparatus, wherein the electrons attach to at least a portion of the reducing gas to form a negatively charged atomic ions which removes metal oxides comprising: a cathode comprising an electrically conductive and comprising at least one or more protrusions having a high surface curvature, wherein the cathode is surrounded by a dielectric material which is then surrounded by an electrically conductive anode wherein the cathode and anode are each connected to an electrical voltage source, and the dielectric material between the cathode and anode is polarized to provide an electric field at one or more protrusions and thereby electrons from the cathode.


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