The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Nov. 26, 2013
Applicant:

Panasonic Corporation, Osaka, JP;

Inventors:

Koutarou Tanaka, Osaka, JP;

Masao Uchida, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 31/0312 (2006.01); H01L 29/739 (2006.01); H01L 31/0328 (2006.01); H01L 31/0336 (2006.01); H01L 31/072 (2012.01); H01L 31/109 (2006.01); H01L 29/06 (2006.01); H01L 29/16 (2006.01); H01L 21/02 (2006.01); H01L 21/765 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0619 (2013.01); H01L 29/1608 (2013.01); H01L 21/02529 (2013.01); H01L 21/765 (2013.01); Y10S 438/931 (2013.01);
Abstract

This semiconductor device includes a silicon carbide layer of a first conductivity type having first and second principal surfaces and including an element region and a terminal region surrounding the element region on the first principal surface. The silicon carbide layer includes a first dopant layer of the first conductivity type contacting with the first principal surface and a second dopant layer of the first conductivity type located closer to the second principal surface than the first dopant layer is. The terminal region has, in its surface portion with a predetermined depth under the first principal surface, a terminal structure including respective portions of the first and second dopant layers and a ring region of a second conductivity type running through the first dopant layer to reach the second dopant layer. The dopant concentration of the first dopant layer is twice to five times as high as that of the second dopant layer. When viewed along a normal to the first principal surface, the first dopant layer is arranged to contact with the ring region both inside and outside of the region.


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