The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Dec. 07, 2012
Applicant:

Fuji Electric Co., Ltd., Kawasaki-shi, JP;

Inventor:

Yasushi Ogimoto, Higashiyamato, JP;

Assignee:

Fuji Electric Co., Ltd., Kawasaki-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 49/00 (2006.01); C30B 29/22 (2006.01); C30B 29/68 (2006.01); C01G 45/12 (2006.01); C30B 23/02 (2006.01); H01L 21/02 (2006.01); C30B 29/16 (2006.01); C23C 14/08 (2006.01); C23C 14/28 (2006.01);
U.S. Cl.
CPC ...
H01L 49/003 (2013.01); C30B 29/22 (2013.01); C30B 29/68 (2013.01); C01G 45/1264 (2013.01); C30B 23/02 (2013.01); H01L 21/02175 (2013.01); H01L 21/02192 (2013.01); H01L 21/02194 (2013.01); H01L 21/02266 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01); C23C 14/083 (2013.01); C23C 14/28 (2013.01); C30B 29/16 (2013.01); H01L 49/02 (2013.01);
Abstract

The present invention provides a thin film or laminate which ensures switching capabilities by phase transition of Mott transition at room temperature. An embodiment of the present invention provides a manganese oxide thin filmformed on a plane of a substrateand having a composition represented by a composition formula RMnO(where R is at least one trivalent rare earth element selected from lanthanoids), wherein an atomic layer containing an element R and not containing Mn and an atomic layer containing Mn and not containing the element R are alternately stacked along a direction perpendicular to the plane of the substrate, and the manganese oxide thin film has two nonequivalent crystal axes along an in-plane direction of the plane of the substrate. An aspect of the present invention also provides an oxide laminate having the manganese oxide thin filmof the above aspect to which strongly-correlated oxide thin filmorare formed contiguously.


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