The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9006164 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 14, 2015

Filed:

Sep. 01, 2010
Applicants:

Hironori Mizuta, Saitama, JP;

Masahiko Kakizawa, Saitama, JP;

Inventors:

Hironori Mizuta, Saitama, JP;

Masahiko Kakizawa, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/60 (2006.01); G03F 7/42 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/426 (2013.01); C11D 11/0047 (2013.01); G03F 7/422 (2013.01); G03F 7/423 (2013.01);
Abstract

The present invention is directed to provide a resist remover composition for semiconductor substrate which enables to remove a resist simply and easily in the photolithography process in the semiconductor field, and a method for removing a resist comprising that the composition is used. The present invention relates to a resist remover composition for semiconductor substrate, comprising [I] a carbon radical generating agent, [II] an acid, [III] a reducing agent, and [IV] an organic solvent, and having pH of lower than 7, and a method for removing a resist, comprising that the composition is used.


Find Patent Forward Citations

Mizuta, Hironori. (2015). Resist remover composition and method for removing resist using the composition (U.S. Patent No. 9006164). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9006164

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