The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Nov. 20, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Solomon Assefa, Ossining, NY (US);

William M. J. Green, Astoria, NY (US);

Yurii A. Vlasov, Katonah, NY (US);

Min Yang, Yorktown Heights, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/8238 (2006.01); H01L 21/762 (2006.01); G02B 6/136 (2006.01); H01L 31/0232 (2014.01); H01L 31/103 (2006.01); H01L 31/105 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
H01L 21/8238 (2013.01); H01L 21/26513 (2013.01); H01L 21/76283 (2013.01); G02B 6/136 (2013.01); H01L 31/02327 (2013.01); H01L 31/103 (2013.01); H01L 31/105 (2013.01);
Abstract

Disclosed are process enhancements to fully integrate the processing of a photonics device into a CMOS manufacturing process flow. A CMOS wafer may be divided into different portions. One of the portions is for the CMOS devices and one or more other portions are for the photonics devices. The photonics devices include a ridged waveguide and a germanium photodetector. The germanium photodetector may utilize a seeded crystallization from melt process so there is more flexibility in the processing of the germanium photodetector.


Find Patent Forward Citations

Loading…