The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Jul. 11, 2012
Applicants:

Chang-seung Lee, Yongin-si, KR;

Joo-ho Lee, Hwaseong-si, KR;

Yong-sung Kim, Namyangju-si, KR;

Chang-youl Moon, Suwon-si, KR;

Inventors:

Chang-seung Lee, Yongin-si, KR;

Joo-ho Lee, Hwaseong-si, KR;

Yong-sung Kim, Namyangju-si, KR;

Chang-youl Moon, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/84 (2006.01); H01L 29/06 (2006.01); H01L 21/683 (2006.01); H01L 29/16 (2006.01); H01L 29/778 (2006.01); H01L 29/417 (2006.01);
U.S. Cl.
CPC ...
H01L 29/778 (2013.01); H01L 21/6835 (2013.01); H01L 29/1606 (2013.01); H01L 29/41775 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/6835 (2013.01); H01L 2221/68368 (2013.01); Y10S 977/734 (2013.01);
Abstract

A method of manufacturing a graphene device may include forming a device portion including a graphene layer on the first substrate; attaching a second substrate on the device portion of the first substrate; and removing the first substrate. The removing of the first substrate may include etching a sacrificial layer between the first substrate and the graphene layer. After removing the first substrate, a third substrate may be attached on the device portion. After attaching the third substrate, the second substrate may be removed.


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