The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Jul. 16, 2013
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;

Inventors:

Cheol-Ho Park, Yongin, KR;

Byung-Sul Kim, Yongin, KR;

Jong-Hyun Yun, Yongin, KR;

Hee-Geun Son, Yongin, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 27/12 (2006.01); H01L 21/324 (2006.01); B23K 26/00 (2014.01); B23K 26/08 (2014.01);
U.S. Cl.
CPC ...
H01L 27/1222 (2013.01); H01L 21/324 (2013.01); H01L 21/67115 (2013.01); H01L 27/1274 (2013.01); B23K 26/0042 (2013.01); B23K 26/0048 (2013.01); B23K 26/0066 (2013.01); B23K 26/0853 (2013.01); B23K 2201/40 (2013.01);
Abstract

A laser annealing apparatus reduces laser annealing time and has a simple configuration. A laser annealing method is used to manufacture a display apparatus. The laser annealing apparatus includes a mounting unit, a substrate mounted on the mounting unit, first and second driving modules installed on the mounting unit and adjusting locations of first and second mark masks to be placed on a part of the substrate, first and second image modules that may obtain image data regarding the first and second mark masks to be location-adjusted by first and second driving modules, and a laser module that radiates a laser beam to the substrate and changes at least a part of an amorphous silicon layer of the substrate to crystalline silicon.


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