The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2015
Filed:
Feb. 24, 2010
Applicants:
Michael D. Henry, Altadena, CA (US);
Andrew P. Homyk, South Pasadena, CA (US);
Axel Scherer, Laguna Beach, CA (US);
Thomas A. Tombrello, Altadena, CA (US);
Sameer Walavalkar, Los Angeles, CA (US);
Inventors:
Michael D. Henry, Altadena, CA (US);
Andrew P. Homyk, South Pasadena, CA (US);
Axel Scherer, Laguna Beach, CA (US);
Thomas A. Tombrello, Altadena, CA (US);
Sameer Walavalkar, Los Angeles, CA (US);
Assignee:
California Institute of Technology, Pasadena, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01L 3/00 (2006.01); H01L 21/308 (2006.01); B81C 1/00 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3086 (2013.01); B81C 1/00111 (2013.01); H01L 21/3065 (2013.01); H01L 21/3081 (2013.01); B81B 2203/0361 (2013.01); B81B 2207/056 (2013.01); H01L 21/30655 (2013.01);
Abstract
Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.