The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2015
Filed:
Jun. 27, 2011
Russell H. Arndt, Fishkill, NY (US);
David F. Hilscher, Poughkeepsie, NY (US);
Russell H. Arndt, Fishkill, NY (US);
David F. Hilscher, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A tool and method is provided for mixing multiple components and feeding a single blend of the multiple components into the tool. The method includes adjusting a concentration of etchant solution. The method includes determining an etch target for each batch of wafers of a plurality of batches of wafers entering an etch chamber of a wafer processing tool. The method further includes adjusting a concentration of 40% NHF to 49% HF for the each batch of wafers of the plurality of batches of wafers entering the wafer processing tool during a single run.